HPV series compound molecular pump is a combination of turbo molecular pump and disc traction pump. It has the characteristics of high pumping speed, high compression ratio when turbo molecular pump molecular flow，high pumping speed and high compression ratio when high pressure of traction pump. The application range of the molecular pump is widened. The compound molecular pump has no selectivity and no memory effect on the pumped gas. Due to the high compression ratio of the gas with large molecular weight, the pump can be obtained without a cold trap and oil baffle. Clean high vacuum and ultra high vacuum. It is widely used in various fields of vacuum technology such as photovoltaics, lighting, aerospace, semiconductors, energy, military, home appliances, materials, and automobiles.

HPV series compound molecular pump is a combination of turbo molecular pump and disc traction pump. It has the characteristics of high pumping speed, high compression ratio when turbo molecular pump molecular flow，high pumping speed and high compression ratio when high pressure of traction pump. The application range of the molecular pump is widened. The compound molecular pump has no selectivity and no memory effect on the pumped gas. Due to the high compression ratio of the gas with large molecular weight, the pump can be obtained without a cold trap and oil baffle. Clean high vacuum and ultra high vacuum. It is widely used in various fields of vacuum technology such as photovoltaics, lighting, aerospace, semiconductors, energy, military, home appliances, materials, and automobiles.

The valve is made of stainless steel as a whole, and the internal moving structure is assembled after strict polishing treatment of stainless steel. The balls and bearings are also made of stainless steel. The sealing methods at the front flange and round flange are sealed with wire. The plate sealing ring is a fluorine moving structure. The welded stainless steel bellows is used to realize the displacement of the valve plate, and a rubber-free ring seal is implemented to the outside, which effectively reduces the leakage rate of the valve body and the outgassing of internal materials. The valve uses electrical signals as switching signals, and compressed air drives the cylinder as power to open and close. The valve has the characteristics of stable work, reliable sealing, small opening and closing vibrations, etc. The valve has two sets of opening and closing position signals to know the current state of the valve, which is convenient for remote control and automatic control, and to automate the equipment. The valve has a compact structure, and its thickness and length are minimized, which makes installation more convenient and requires less space. The applicable medium of the valve is clean air and non-corrosive gas. The valve can be arbitrarily installed and can withstand a certain pressure.

The pump combines our proven bearing technology (oil-lubricated ceramic lower bearing and dry permanent magnet upper bearing) with an improved rotor design using new molecular grading technology to provide improved pumping speed and compression ratio while providing true User maintainability.