pilot-scale production

μ-650c systems tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully customisable to match specific applications.

μ-570c systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation.μ-570c  systems are glovebox-compatible for atmosphere-sensitive applications.μ-570c  systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.

μ-450c systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation.μ-450c  systems are glovebox-compatible for atmosphere-sensitive applications.