A rotary cathode (cylindrical cathode) is a device used for SPUTTERING target material from the surface of a rotating target tube onto a substrate.
A hollow tube of target material rotates around a stationary magnet array suspended inside the tube. This stationary magnet array is directed at the substrate and holds the process plasma in the desired location.
Electric power is transmitted to the rotating target tube. The cathode is the target tube surface since the electrons leave from the target surface and enter the plasma. Cooling water is usually used inside the target tube for sputtering process cooling
Powered by a motor, an end block rotates the target tube. It has rotary seals for both cooling water and vacuum. While the cathode assembly is mounted to the inside lid of a vacuum chamber, the end blocks can be external to the chamber or inside the chamber.
Please watch our YouTube video for more information about rotary cathodes.
