Application of Vacuum System in Flat Panel Display Industry
The vacuum system is suitable for vacuum and air pollution control equipment in the flat panel display industry.
The flat panel display (FPD) manufacturing process requires vacuum and emission reduction equipment that can support huge processing chambers and deliver high gas flow rates with maximum reliability. A vacuum system is required to pump toxic, spontaneous and corrosive gases, and to handle a large number of solid process by-products formed in the manufacturing process chamber.
Experience in the FPD field allows us to develop solutions that can solve customer process problems and optimize productivity. Our widely used vacuum system is specially designed to maximize substrate throughput and final zero-humidity process conditions, while reducing power consumption, floor space and weight as much as possible.
When used in conjunction with our exhaust gas management system, it can manage high gas flow and effectively reduce toxic and flammable gases, while extending maintenance intervals. In addition, multiple chambers can be connected to one tool to achieve a complete integrated vacuum and reduction Row solutions.
